Etiqueta de registo: 00000nam 2200025 450
001 2126236
003 http://id.bnportugal.gov.pt/bib/catbnp/2126236
100 ## $a20230313d2022 k y0pory01030103ba
101 0# $aeng$dpor
102 ## $aPT
105 ## $aa m 000yy
106 ## $ar
200 1# $aDeposição por camada atómica de filmes com elevada constante dielétrica para estruturas MOS em diamante$dAtomic layer deposition of High-k Dielectric films for diamond MOS structures$fAneeta Jaggernauth$gorient. Rui Ramos Ferreira e Silva, Joana Catarina Mendes$zeng
210 #9 $aAveiro$c[s.n.],$d2022
215 ## $aVIII, 117 p.$cil. $d30 cm
328 #1 $aTese dout. Ciência e Engenharia de Materiais, Universidade de Aveiro, 2022
510 1# $aAtomic layer deposition of High-k Dielectric films for diamond MOS structures$zeng
675 ## $a621.3.01(043)$vBN$zpor$31271824
675 ## $a537.22(043)$vBN$zpor$31274174
700 #1 $aJaggernauth,$bAneeta$31876049
702 #1 $aSilva,$bRui Ferreira e$4727$3143588
702 #1 $aMendes,$bJoana Catarina$4727$31876050
801 #0 $aPT$bBN$gRPC
966 ## $lBN$mFGMON$sS.A. 184756 V.$x1
971 ## $corlando$d20230313
972 ## $e0$z0$d20230619$vmsebas
973 ## $cigoulao$d20230615