Etiqueta de registo: 00000nam 2200025 450
001 2204203
003 http://id.bnportugal.gov.pt/bib/catbnp/2204203
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101 0# $aeng$dpor
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200 1# $aThin-flim amorphous silicon flexural MEMS resonators on flexible substrates and coupled arrays$fTiago André da Glória Pestana$gorient. João Pedro Estrela Rodrigues Conde, Virginia Chu
210 #9 $aLisboa$c[s.n.],$d2024
215 ## $aXXVIII, 276 p.$cil.$d30 cm
328 #1 $aTese dout. Materials Engineering, Instituto Superior Técnico, Universidade de Lisboa, 2024
675 ## $a621.37(043)$vBN$zpor$3342263
700 #1 $aPestana,$bTiago André da Glória$31943619
702 #1 $aConde,$bJoão Pedro Estrela Rodrigues$4727$31257454
702 #1 $aChu,$bVirgínia$4727$31375943
801 #0 $aPT$bBN$gRPC
966 ## $lBN$mFGMON$sS.A. 190152 V.$x1
971 ## $ccsilva$d20250204
972 ## $e0$z0$d20250313$viquintas
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